Wafer Inspection Systems
V3000 Macro-Scope Inspection System
The V3000 Macro-Scope Inspection System is a powerful, easy-to-use, dual-cassette, all-in-one wafer-inspection system that is able to handle both macro- and micro-inspection of wafers. The system can be operated in either automatic or manual mode, making it possible to perform automated and manual inspections both on one system. It comes with a simple, intuitive, easy-to-use graphical user interface that allows the operator to carry out all inspection operations with ease. The system enable the operator to easily spot defects during macro inspection and then, with a few simple key strokes, clicks of the buttons, or touches on the screen, seamlessly move the substrate to the microscope for detailed inspections.
Key Features
- Four lighting sources for macro inspection makes it easy to detect gross defects
- Capability of handling 50 mm -200 mm substrates
- Auto-bridging for different-sized substrates
- Wafer-flipping for backside inspection
- Macro inspection module with 3-axis tilt rotating gimble chuck
- Standard Leica DM8000 microscope
- Optical Character Recognition (OCR)