Wafer Inspection Systems
V2000 Bright Light
The V2000 Bright Light is a powerful, easy-to-use, dual-cassette, wafer-inspection system that can effectively discover all types of defects on wafers. The system can be operated in either auto or manual mode: the former automates wafer inspection through the use of recipes while the latter allows the operator the maximum operation flexibility. All operations, whether auto or manual, are carried out through the system’s intuitive graphical user interface. Its 34” x 45” footprint ensures that the system can be conveniently installed on a table top.
Sample defect that can be seen with the V2000 Bright Light. The bright light reveals a resist striation from two separate particles that were on the wafer prior to spin coat. Get Brochure
Our customers have reduced microscope inspection by 90% — saving time, money, and operator fatigue while improving yield out of the lithography area. The bright light catches nearly all wafer defects found in most photolithography areas.
Key Features
- Cassette mapping automatically discovers and shows the content of a cassette
- Dual operation mode (auto and manual) ensures both operation efficiency and flexibility
- Recipes allow you to easily create and standardize wafer inspection procedures
- The 3-axis tilt and rotate gimble chuck, plus light-controlled inspection housing, offers the optimal wafer-inspection environment
- CE mark ensures the system’s compliance with the high international industry requirements.
Option
- Four light configuration
- Dual-size bridging
- Wafer alignment
- Backside inspection
- Ergonomic cassette loading
- OCR M12, M13, T7, Barcode