Wafer Inspection Systems
V1000 Microscope Loader
The V1000 Microscope Loader is a computerized, recipe-driven, wafer-loading system that automatically loads wafers from the cassette onto the inspection platform of a microscope. The recipes, once created, are saved in the system’s database and can be selected for use from the system’s intuitive graphical user interface (GUI). The system is compatible with any microscope; its 515mm x 650mm footprint makes it easy to fit the Loader and microscope onto a table top.
Key Features
- Cassette mapping automatically discovers and shows the content of a cassette
- Recipe-driven operations automate the wafer-loading and inspection process, ensuring maximum operation precision and accuracy
- Touch-screen screen operation makes the system extremely easy to operate
- Compatibility with all microscopes and stages makes it possible for the system to work with any microscope
- Ergonomic speed handle with user-configurable controls also allows for great flexibility for manual operations
- CE mark ensures the system’s compliance with the high international industry requirements.
Option
- Dual-size bridging
- Wafer alignment
- Ergonomic cassette loading
- Bright Light inspection
- Motorized stage applications
- OCR M12, M13, T7, and barcode
- SECS/GEM compliant