Spin Coater & Developer
SVG 8x Track Systems
C&D manufactures, refurbishes, and rebuilds all legacy SVG 8x Track Systems according to the original SVG specifications or C&D’s proprietary innovative upgrades. The SVG 86x runs well for 2” to 6” square or rectangle substrates while the SVG 88x can process 2” to 8” substrates whose transfer arms provides minimal wafer backside contact. The systems feature process modules that can be easily removed for troubleshooting and maintenance and cabinets that be built large enough for adding more modules.
Key Features:
- Clean dispense line tips
- Dual-size bridging without hardware changeover (88 model)
- Upgraded ATS arms for repeatability (88 model)
- Low turbulence catch cup
- High-performance motors for improved uniformity and reliability
- Digital vacuum switches
- Sub-micron capability
- CE mark certifies compliance with EU requirements
Coater
The SVG 8X coater comes standard with pivoting dispense and three (3) dispense capability with an optional fourth dispense. It also comes standard with top and bottom edge bead removal (EBR).
Additional options include:
- Resist temperature control
- Exhaust flow control
- Vapor prime module
- Dual chamber vapor tip bath
- C&D Recipe Master
- Submicron Coat (SMC)
- Dual wafer size bridging without any hardware change
The C&D Low Turbulence catch cup is designed to greatly reduce the exhaust flow requirement by up to 60% thereby delaying resist drying and virtually eliminating the chance of particulate generation in the Cup. The upper section of the Cup is specific to each wafer size which assures the exhaust flow will be optimized for a given wafer size.
Developer
The SVG 8X Developer comes with either a stationary or moving dispense system and single or dual dispense capability.
Additional options include:
- Constant temperature control
- Exhaust flow control
- C&D Recipe Master
- Flood Expose capability
- Dual wafer size bridging without any hardware change
The SVG 8X track systems can be equipped with a Hot Plate Oven (HPO) or multiple HPOs and chill plates.