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C&D Semi Data Sheet (PDF)


S5000: Simple and fast Wafer Sorting

With industry leading throughput, reliability and technology, the S5000 Wafer Sorter is the automatic choice for all your wafer sorting needs.

C&D’s sorters are designed and manufactured with their customer’s requirements in mind: speed, reliability and user friendliness.




Unrivaled Specification:

  • 750 WPH cassette to cassette transfer
  • 350 WPH with align and OCR
  • Dimensions: 1200mm x 1000mm (4 cassette)
  • Class 1 cleanliness = ≤0.8 particles at 0.12µm
  • Cassette Mapping
  • OCR: M12, M13 Barcode, T7
  • UPS for continued operation after power out
  • Vacuum reservoir for continued operation after house vac failure
  • C&D SmartSort intuitive Software User Interface: Split, Sort, Merge, Wand functions

Standards are as follows:

  • Full SEMI Compliance
  • Full CE Compliance







Unrivalled Component Listing:

  • Industry leading 3 axis robot
  • Industry leading pre-aligner with:
    • Linear Accuracy ±0.0025mm
    • Circular Accuracy ±0.05°
    • SEMI Standard Safety Light Curtains
    • Overhead ESD eliminating ionizer bar
    • Dual End Effector for maximum throughput
    • Cassette Present Easy Load indicators
    • Auto e-mail off-line configuration files

Options available:

  • 100mm – 200mm Autosizing Bridge Tool
  • 200mm – 300mm Autosizing Bridge Tool
  • 2, 3 or 4 cassette stations.
  • SECS/GEM integration
  • 3rd Party data sorting for sorting on data generated from other process tools.
  • SMIF 200mm
  • SMIF and Open (on same tool) 200mm
  • Wafer thickness measurement (accuracy of 0.1µm)