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C&D Semi Data Sheet (PDF)
Download C&D Semi S5000 Data Sheet (PDF)S5000: Simple and fast Wafer Sorting
With industry leading throughput, reliability and technology, the S5000 Wafer Sorter is the automatic choice for all your wafer sorting needs.
C&D’s sorters are designed and manufactured with their customer’s requirements in mind: speed, reliability and user friendliness.
Unrivaled Specification:
- 750 WPH cassette to cassette transfer
- 350 WPH with align and OCR
- Dimensions: 1200mm x 1000mm (4 cassette)
- Class 1 cleanliness = ≤0.8 particles at 0.12µm
- Cassette Mapping
- OCR: M12, M13 Barcode, T7
- UPS for continued operation after power out
- Vacuum reservoir for continued operation after house vac failure
- C&D SmartSort intuitive Software User Interface: Split, Sort, Merge, Wand functions
Standards are as follows:
- Full SEMI Compliance
- Full CE Compliance
Unrivalled Component Listing:
- Industry leading 3 axis robot
- Industry leading pre-aligner with:
- Linear Accuracy ±0.0025mm
- Circular Accuracy ±0.05°
- SEMI Standard Safety Light Curtains
- Overhead ESD eliminating ionizer bar
- Dual End Effector for maximum throughput
- Cassette Present Easy Load indicators
- Auto e-mail off-line configuration files
Options available:
- 100mm – 200mm Autosizing Bridge Tool
- 200mm – 300mm Autosizing Bridge Tool
- 2, 3 or 4 cassette stations.
- SECS/GEM integration
- 3rd Party data sorting for sorting on data generated from other process tools.
- SMIF 200mm
- SMIF and Open (on same tool) 200mm
- Wafer thickness measurement (accuracy of 0.1µm)