S4000: Small Footprint, 2 Cassette, Wafer OCR Sorting Transfer Machine

Flexible, ergonomic and user friendly wafer sorting machine

The S4000 Wafer Sorter is a two cassette benchtop system with an impressive 34” x 45” footprint. The system has cassettes in a symmetrical layout which allows a dual end effector robot to transfer wafers at high speed between the cassettes via the pre-aligner and OCR station.

Prior to wafer sorting the cassettes are automatically mapped to determine occupied and empty slots as well as cross slot wafers. After cassette mapping the sorter transfers the wafer based upon the criteria within the recipe. Sorting can be conducted using wafer slot position or Wafer ID as the critical move factor.

The Wafer Sorter uses state of the art OCR technology for reading the ID mark on a wafer. The OCR system is capable of reading alphanumeric laser scribes, T7 dot matrix or barcodes all without any hardware changeover or recipe modifications. Read rate is typically greater >99%.

It is also possible to include multiple cameras on a wafer sorter should a customer require reading of scribes on the topside and bottom side of the wafer.