P8000: PC Controlled Linear Track System

The P8000 system is capable of processing 2” – 8” wafers with optional dual wafer size bridging.

The P8000’s powerful Rabbit Microprocessors and GUI interface provide capabilities never before seen on linear track systems. Because the system uses a PC users have expanded recipe storage. No longer are users limited to 9 recipes or have to worry about losing stored programs due power failures. The system has the capability to monitor process parameters in real time as well as data log errors and wafer to wafer data to make failures easy to diagnose. With the P8000 control system users can manually exercise various modules for troubleshooting and performing preventive maintenance. The P8000 has the capability of password protection to prevent unauthorized access to programs as well as lot traceability. This software package has proven to substantially reduce programming errors.

The redesigned dual chamber dunker, one chamber filled with solvent the other used for pre-dispense, keeps dispense tips clean and ready to go.

The P8000 Frame Processor can process wafers mounted on 8” or 10” frames. The system can be configured with either manual load where each frame is processed individually or automatic load. In automatic mode the frames are loaded into a cassette and returned to the cassette once the process is complete. The dispense head, which can be configured with four dispense lines, pivots down and has the capability of moving while the frame is spun on the chuck.

C&D’s proprietary control box eliminates the need for card cages. The P8000 is designed to have one control box per track. This compact box is discreetly mounted within the system away from waste and chemical lines. Current SVG users can convert to the C&D P8000 control system with ease. A PC is configured to your system, the card cages removed, and existing cables can plug directly into the C&D control box. The control box is designed to be a plug and play device.