V2000: User Friendly Bright Light Inspection Station

C&D’s V2000 system is an extremely user friendly, benchtop 2 cassette in-line Bright Light Station.


Perfect for detecting all types of defects on wafer sizes 100mm – 200mm. The system is designed for minimum interaction from an operator which allows for a higher throughput and ease of operation.

 

Unrivalled Specification:

  • Recipe Based Software Graphical User Interface, allows:
    • Multiple Inspection Phases within a recipe
    • Inspection Recipes stored locally
  • Small Footprint
  • Wobble Chuck with joystick controls for:
    • Tilt X
    • Tilt Y
    • Rotation Direction
    • Rotation ON/OFF
    • Rotation Speed
  • Reject/Accept Options
  • 2 cassette stations
  • Benchtop system

Options Include:

  • Up to 4 Light Types as per matrix above
  • Dual Size Bridging between 100mm and 200mm
  • Wafer Alignment
  • Backside Inspection
  • Ergonomic Cassette Loading
  • OCR, M12, M13, T7, Barcode