Wafer Sorter
S5030 Sorter (up to 300 mm)
The S5030 Sorter is a recipe-driven wafer sorting system which is capable to sort wafers up to 300mm. The system features a fixed thickness gauge as well as state-of-the-art Optical Character Recognition (OCR), enabling it to sort wafers either based on thickness or OCR. Its Uninterrupted Power Supply (UPS) ensures safe wafer transfer and data backup in the event of a power failure. It can also process wafers based on process data generated by third-party machines.
Key Features
- Intuitive graphical user interface simplifies the complex wafer sorting functions into four easy-to-operate operations: sort, split, merge, and wand.
- Cassette mapping automatically detects and displays the presence/absence of wafer in each slot and wafer state.
- Support for OCR, M12, M13, T7, and Barcode
- High-precision pre-aligner
- Cleanroom Class 1 compatible
- Load Port Modules for FOUP, FOSB, Crystal Pak compatibility
- Dual end effector for maximum throughput
- Linear accuracy ±0.0025mm
- Circular accuracy ±0.05°
- CE Mark certifies the system’s compliance with the high EU requirements.
Options
- Top or bottom side OCR
- Wafer thickness measurement
- Dual-size bridging
- Integration with third-party tools
- SECS/GEM integration