Spin Coater & Developer
P8010 Advanced Linear System
The P8010 Advanced Linear System is a recipe-driven wafer coater and developer, featuring powerful Rabbit Microprocessors and an intuitive graphical user interface (GUI), which provides unprecedented capabilities for linear track systems. The system offers a wide range of functions which include expanded recipe storage, data logging, manual exercise mode, and system networking. The system can be configured with modules for coating, developing, baking, priming, and chilling.
Key Features:
- Ability to process 50 mm – 200 mm substrates
- Dual-size bridging without hardware changeover
- Windows-based user-friendly GUI allowing for expanded recipe storage, monitoring of process parameters in real time, etc.
- Exercise component for troubleshooting and performing preventive maintenance.
- Upgraded ATS arms for improved repeatability
- Upgrade from SVG 8x Card Cage Interface
- CE mark certifies the system’s compliance with EU requirements
- SECS/GEM compliant (optional)
Because the system uses a PC, users have expanded recipe storage. No longer are users limited to 9 recipes or have to worry about losing stored programs due power failures. The system has the capability to monitor process parameters in real time as well as data log errors and wafer to wafer data to make failures easy to diagnose.
The P8000 has the capability of password protection to prevent unauthorized access to programs as well as lot traceability. This software package has proven to substantially reduce programming errors.
With the P8000 control system users can manually exercise various modules for troubleshooting and performing preventive maintenance.
C&D’s proprietary control box eliminates the need for card cages. The P8000 is designed to have one control box per track. This compact box is discreetly mounted within the system away from waste and chemical lines. Current SVG users can convert to the C&D P8000 control system with ease. A PC is configured to your system, the card cages removed, and existing cables can plug directly into the C&D control box.